xR80

Quantum xR80 and xR LEAP’s System of low energy implantation is an essential technology for the fabrication of semiconductors using 0.18 micron and below features. Designed for 300mm wafers, the Quantum evolutionary platform is easily adaptable to 200mm and 150mm wafer sizes. The system incorporates a 300mm compatible factory automation module for fully automatic wafer handling, yet remains almost the same size as the company’s compact 200mm xR LEAP system.