CDO 858/859

The Delatech CDO 858/859 Exhaust Gas Scrubber has long been considered the standard for Advanced Chemical Vapor Deposition CVD Process gas abatement, and has been effectively used with all PECVD, LPCVD MOCVD process gases. Delatech scrubbers are also widely used in Thin Film processes. This versatile gas scrubber utilizes a combination Thermal Oxidation Chamber and a Primary/Secondary Cooling Wet Scrubbing Chamber to effectively abate toxic, flammable and corrosive gases.