| Part number | Brand | Description |
|---|---|---|
| 0021-13406 | ANELVA | CLAMP, LINER GROUND STRAP |
| 0161-43890M | ANELVA | CRYSTAL ION GAUGE REBUILD |
| 0200-01463 | ANELVA | 2 QUARTZ, SHADOW RING |
| 0200-03300 | ANELVA | 2 RING, SHADOW QUARTZ |
| 0200-10073 | ANELVA | 2 QUARTZ, INSULATOR |
| 0720-02932 | ANELVA | CONNECTOR, BANANA JACK |
| 1001-91527 | ANELVA | ROBOT BLADE END EFFECTOR |
| 1027-27081 | ANELVA | 2 X RING CHUCK |
| 1037-28153 | ANELVA | AMAT HK-M Anelva Tin Stage Shield |
| 1058-34706 | ANELVA | 2 ESC QUARTZ RING |
| 1065-059-01 | ANELVA | ANELVA, MANIFOLD |
| 1805-220177-12 | ANELVA | 2 Shield Ring SCCM |
| 2012 | ANELVA | CLIPPARD SAFETY VALVE |
| 2BDV4C-FV-L135 | ANELVA | VALVE, DIAPHRAGM |
| 3IK15GN-A | ANELVA | INDUCTION MOTOR |
| 46F098 | ANELVA | FUSE, GAS ANALYZER 6.3A 250V MDA |
| 500104897 | ANELVA | ISOLATION GATE VALVE AV71 |
| 5X20mm | ANELVA | FUSE 6.3A MARANGONI DRYER |
| 9004-43508 | ANELVA | MAGNET, CATHODE |
| 9004-80152 | ANELVA | MFC CONTROLLER CCL-MFC |
| 9006-31088 | ANELVA, UNIT INSTRUMENTS | R MATCH UNIT 60MHZ 5KW |
| 9007-31731 | ANELVA | R ETCH DUAL RF GENERATOR |
| 91-35075-A | ANELVA | 2 RING TOP SILICON |
| 912-7060 | ANELVA | SPUTTER ION GAUGE PUMP W/ PUMP CONTROL UNIT PIC-400 NP |
| 95-11323945 | ANELVA | deleted Peninguge |
| 953-5070 | ANELVA | GASKET, COPPER |
| 954-7700 | ANELVA | PRESSURE SENSOR VACUUM SWITCH, 125/250VAC, 15A |
| A12-66778 | ANELVA | 2 SHIELD LOWER PUMPING |
| A14-25218 | ANELVA | LIFT UP SHAFT 246L |
| A17-50019-02 | ANELVA | THERMOCOUPLE,L 255 |
| A18-43534 | ANELVA | SEPARATION CHAMBER O-RING |
| ANELVA 1060 | ANELVA | C 2 ANELVA 1060 Ti KIT |
| ANELVA 1060 | ANELVA | C 2 ANELVA 1060 LT Ti KIT |
| ARM PY8, FORK B12-18774 | ANELVA | 2 T2 ARM PY8 INCH ROBOT FORK B12-18774 |
| BIT 120627 | ANELVA | BALLPOINT 2.5MM HEX KEY POWER BIT 120627 |
| BIT 120628 | ANELVA | BALLPOINT 3MM HEX KEY POWER BIT 120628 |