| Part number | Brand | Description |
|---|---|---|
| 5041.600.2700 | UNIT INSTRUMENTS | O2 SYSTEM UNIT VER 4.1.3 |
| 00-816517-02 R10 TURBO-V 301-AG | UNIT INSTRUMENTS | FORELINE PRESSURE UNIT |
| 00-816517-02R1 | UNIT INSTRUMENTS | FORELINE PRESSURE UNIT |
| 0010-00023 | UNIT INSTRUMENTS | ASSEMBLY, BPSG, CHAM A, W UNIT, RTP |
| 0010-00023 | UNIT INSTRUMENTS | ASSEMBLY. BPSG. CHAM A, W/UNIT, 10RA RTP |
| 0010-02889 | UNIT INSTRUMENTS | ASSEMBLY, BPSG, CH. B, W/UNIT, RTP |
| 0010-02889 | UNIT INSTRUMENTS | ASSEMBLY, BPSG, CHAM B W/UNIT, 10RA, RTP |
| 0010-03133 | UNIT INSTRUMENTS | ASSEMBLY, O2 ANALYZER CALIBRATION UNIT |
| 0010-03974 | UNIT INSTRUMENTS | DDF3 PNEUM CNTRL UNIT |
| 0010-05210 | UNIT INSTRUMENTS | ASSY, N2 PURGE, UNIT, 200MM RADIANCE |
| 0010-05281 | UNIT INSTRUMENTS | TOP ASSY, N2 PRG LAMP PRG, UNIT, 200MM |
| 0010-10106 | UNIT INSTRUMENTS | VDS FACILITY COMPONENTS INTERFACE UNIT |
| 0010-10106 | UNIT INSTRUMENTS | VDS Facility Components Interface Interface Unit |
| 0010-12115 | UNIT INSTRUMENTS | 2 POWER SUPPLY UNIT DC, F47 COMPLIANT, A |
| 0010-12574 | UNIT INSTRUMENTS | FAN FILTER UNIT ENDURA ASSEMBLY, 5.3 FI |
| 0010-13880 | UNIT INSTRUMENTS | FAN FILTER UNIT ENDURA ASSEMBLY, 5.3 FI |
| 0010-15428 | UNIT INSTRUMENTS | ASSY, DI WATER, NOVA CONTROL UNIT, REFLE |
| 0010-16913 | UNIT INSTRUMENTS | DRAWER, SLURRY A UNIT |
| 0010-26926 | UNIT INSTRUMENTS | PNEUMATIC CONTROL UNIT |
| 0010-26953 | UNIT INSTRUMENTS | DDF3 PNEUMATIC CONTROL UNIT |
| 0010-28991 | UNIT INSTRUMENTS | ROTARY UNIT, ENDURA2 UNIVERSAL CW ASSY, |
| 0010-28992 | UNIT INSTRUMENTS | ROTARY UNIT, PMR-MSC ASSY, ENDURA2 SOURC |
| 0010-30125 | UNIT INSTRUMENTS | DPS, METAL DOME TEMP. CONTROL UNIT, ASSY |
| 0010-36901 | UNIT INSTRUMENTS | ASSY, DOME TEMP. CONTROL UNIT, DPS POLY |
| 0010-46407 | UNIT INSTRUMENTS | WELDMENT REV 1 UNIT. |
| 0010-70878 | UNIT INSTRUMENTS | ASSY, ICE UNIT, 2MHZ RF MATCH |
| 0010-77201 | UNIT INSTRUMENTS | PNEUMATIC CONTRL UNIT |
| 0010-77230 | UNIT INSTRUMENTS | PNEUMATIC CONTROL UNIT |
| 0010-77239 | UNIT INSTRUMENTS | SLURRY A UNIT |
| 0010-77240 | UNIT INSTRUMENTS | SLURRY B UNIT |
| 0010-77357 | UNIT INSTRUMENTS | DDF3 PNEUM CNTRL UNIT |
| 0010-77368 | UNIT INSTRUMENTS | ENCLOSURE, VENTED, CONROL UNIT 75 NOVA |
| 0010-77369 | UNIT INSTRUMENTS | RIGHT RAIL ASSY, CONTROL UNIT ENCLOSURE |
| 0010-77370 | UNIT INSTRUMENTS | LEFT RAIL ASSY, CONTROL UNIT ENCLOSURE 7 |
| 0010-91409 | UNIT INSTRUMENTS | GAS MODULE,BF3 WRED UNIT MFC |
| 0010-92209 | UNIT INSTRUMENTS | GAS MODULE, SDS UNIT 8160MFC |