| Part number | Brand | Description |
|---|---|---|
| 03-322715A01 | QUAD | Pcb Assy-Quad-Serial Slot 14 |
| 0010-33476 | AMAT | Idler assy meg tank |
| 0010-35747 | AMAT | Meg Tank Idler Assy |
| 0010-36299 | AMAT | Roller 2 Assy |
| 0010-36300 | AMAT | Roller 1 Assy |
| 0010-46418 | AMAT | Assembly, Rtpc Module |
| 0010-63614 | AMAT | Brush module idler assy |
| 0020-19428 | AMAT | Bellows, pedestal, loadcup |
| 0020-90015 | AMAT | Idler washer |
| 0021-26287 | AMAT | Idler Extended Meg Tank |
| 0021-26287 | AMAT | Idler extend meg tank |
| 0021-26607 | AMAT | Roller washer |
| 0021-27285 | AMAT | PUSHER TIP,VDPM DESICA 300MM |
| 0021-27285 | AMAT | Pusher Tip,Vdpm |
| 0021-44861 | AMAT | Brush Spray Bar Flare Fitting |
| 0021-55008 | AMAT | Bracket, Belt Idler Mt |
| 0021-55244 | AMAT | HPLC pedestal |
| 0021-83077 | AMAT | Platen Shield Bellows |
| 0021-83600 | AMAT | GIMBAL disk |
| 0022-02756 | AMAT | Wafer Bend Constraint, Ehclu, Lk Prime |
| 0022-03754 | AMAT | Adaptor, Cap, Adjust, Holder Mount, Shaft |
| 0022-04678 | AMAT | Bearing Gimbal Pad Conditioner |
| 0022-04679 | AMAT | Flexure, Gimbal Pad Conditioner |
| 0040-78239 | AMAT | Bellows, gripper |
| 0040-87416 | AMAT | Roller welded meg module |
| 0041-05177 | AMAT | Spring, Wafer Exchanger, Lcwe |
| 0041-05178 | AMAT | Spring, Cone, Lcwe |
| 0041-38734 | AMAT | Bellows, cone, loadcup |
| 0041-39479 | AMAT | Wafer sensor, pedestal |
| 0051-06133 | AMAT | Ipa Spary Mainfold Weldment 3000Mm Vdpm |
| 0051-26238 | AMAT | Plug Union Female 1 Inch Pvc |
| 0090-01270 | AMAT | Linear sensor, load cup 100mm |
| 0090-01271 | AMAT | Linear sensor, load cup, 25mm |
| 0090-04087 | AMAT | Sensor, catcher lowered, output station |
| 0090-04088 | AMAT | Sensor,Catcher Raised, Output Station |
| 0090-04123 | AMAT | Dryer tank output sensor |