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O2 Technology

O2 Technology repairs and refurbishes semiconductor equipment components for AMAT, LAM, MKS, TEL, and other brands. Services include CMP pad conditioner head assembly, spindle repair, robot overhaul, photo chuck repair, ozone generator repair, and diffusion furnace relocation. The vendor specializes in retainer rings, vacuum bellows, and remote plasma source repair for CMP and diffusion processes.

At a glance

Last updated
Updated 2 weeks ago
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o2teco.com
Part numberBrandDescription
0010-16392AMATSurface retreatment, Re-bonding
0010-05966AMATSurface retreatment, Re-bonding
0010-05966AMAT
0010-05971AMATSurface retreatment / Re-bonding
0010-05971AMAT
0010-11216AMAT
0010-11216AMATSurface retreatment, Re-bonding
0010-15452AMATSurface retreatment, Plate replacement
0010-15452AMAT
0010-15668AMAT
0010-15668AMATSurface retreatment, Plate replacement
0010-16392AMAT
0010-27784AMAT
0010-27784AMATSurface retreatment, Re-bonding
0010-77331AMATAMAT CMP Spindle
0040-18219AMAT
0040-18219AMATCoating / 8"
0040-48594AMAT
0040-48594AMATCoating / 12"
0040-78244AMAT
0040-78244 0041-31511Enabler E2 300mm SiC
0040-84390AMAT
0040-84391, 0041-03585AMAT
0040-87046AMAT
0040-87046 0040-87047AMATE-max CT 300mm SiC
0040-87047AMAT
0040-87958AMAT
0040-87958AMATProducer Y2O3
0041-25010AMATE5 Showehead SiC
0041-31511AMAT
0190-12806, 0190-12809AMAT
0190-23942AMATSurface retreatment, Plate replacement
0190-23942AMAT
0190-25087AMATSurface retreatment, Plate replacement
0190-25087AMAT
02-314135-01