| Part number | Brand | Description |
|---|---|---|
| 8116148G004 | CTI-CRYOGENICS | On-Board OB10 |
| 8116199G001 | CTI-CRYOGENICS | On-Board OB8F |
| 8116208G001 | CTI-CRYOGENICS | On-Board OB8 |
| 8116209G001 | CTI-CRYOGENICS | On-Board OB10 |
| 8116231G002 | CTI-CRYOGENICS | On-Board OB10 |
| 8116239G002 | CTI-CRYOGENICS | On-Board OB400 |
| 8116252G001 | CTI-CRYOGENICS | On-Board OB400 |
| 8116291G001 | CTI-CRYOGENICS | On-Board OB10 |
| 8116311G001 | CTI-CRYOGENICS | On-Board OB8 |
| 8124063G001 | CTI-CRYOGENICS | On-Board 3Ph Motor Controller |
| 8135900G001 | CTI-CRYOGENICS | 9600 Compressor, 200-230 VAC 50/60 Hz, |
| 8135901G001 | CTI-CRYOGENICS | 9600 Compressor, 380-400 VAC 50/60 Hz, |
| 8135928G001 | CTI-CRYOGENICS | IS1000 Compressor, 342-528 VAC 50/60 |
| 8185133G001 | CTI-CRYOGENICS | On-Board OBIS 250Fe |
| 9010-00272 | AMAT | 13297 |
| 9240-00879 | AMAT | xR80 Motor Spindle Assembly 13295 MOD8 |
| 9240-00879 | AMAT | |
| A1010070 / A1010080 | HITEK POWER® | OL8000 HV Power Supply Driver Stack |
| A184/55/ | WALLIS HIVOLT® | Accel Power Supply |
| CTRL 1166-0001-0001 | AXCELIS | Source Terminal Data Link |
| CTRL 1166-0002-0002 | AXCELIS | Magnet Terminal Data Link |
| CTRL 1166-0002-0003 | AXCELIS | Magnet Terminal Data Link |
| CTRL 2215047 | VARIAN | 842 ION Gauge Controller |
| CTRL 804202G002 | CTI-CRYOGENICS | On-Board® Frequency Converter |
| CTRL 8124063G001 | CTI-CRYOGENICS | On-Board®3Ph Motor Controller |
| CTRL E11042920 | VARIAN | Dual Arc Filament Controller |
| CTRL E23000001 | VARIAN | Cold Cathode Ion Gauge Controller |
| CTRL E70827-1 | VARIAN | Uniformity Monitor |
| D-4215 | TC Gauge Controller | |
| D12007817-1 | VARIAN | Electron Bias Power Supply |
| D7920-2 | VARIAN | Suppression Power Supply |
| E11042920 | ||
| E11042920 | VARIAN | DUAL ARC FILAMENT CONTROLLER |
| E15002344 | ||
| E15002344 | VARIAN | PCB Subassy Power Supply Controller |
| E15002358 |