| Part number | Brand | Description |
|---|---|---|
| 0100-01985 | AMAT | Enhanced OTF Centerfinder |
| 0100-02016 | AMAT | Analog sync detect BD |
| 0100-09008 | AMAT | Pneumatic control BD. |
| 0100-09054 | AMAT | Analog input PCB |
| 0100-09094 | AMAT | Box heater control board |
| 0100-09169 | AMAT | Mizar, expanded RS232 controller |
| 0100-09225 | AMAT | TC AMP INTERLOCK BD |
| 0100-09299 | AMAT | Serial sideboard ASSY |
| 0100-11001 | AMAT | Analog output board |
| 0100-11002 | AMAT | Digital I/O card |
| 0100-20001 | AMAT | SEI board |
| 0100-20003 | AMAT | Digital I/O PCB |
| 0100-20012 | AMAT | Isolation amplifier board |
| 0100-20063 | AMAT | TC Gauge PCB |
| 0100-20068 | AMAT | CCD Array PC board |
| 0100-20069 | AMAT | Wafer orienter board |
| 0100-20100 | AMAT | Analog I/O card |
| 0100-35054 | AMAT | Chamber interface PCB |
| 0100-51005 | AMAT | PCB |
| 0100-51017 | AMAT | Chopper driver |
| 0100-76004 | AMAT | OTF centerfinder |
| 0100-76042 | AMAT | Enhanced OTF centerfinder |
| 0100-76124 | AMAT | Digital I/O card |
| 0100-77017 | AMAT | Lower Pneumatic PC board |
| 0133235-000 | PCA, SBC SBC daughter board DSPpro VME DB-VMESA | |
| 0160-A0261 | AMAT | Piezo Amplifier HVPZT E-507-00 |
| 0190-00312-001 71-100-1856 REV 01 | Radiance, MAG LEV rotation controller 200mm | |
| 0190-00318 AMAT 486 | AMAT | Radisys, CPU board |
| 0190-00390 | ENI | ENI, DPGS-10-05 RF generator |
| 0190-00398 | ASTEX | ASTEX, MW controller ARX-X491 |
| 0190-00635 | AMAT | Mainframe interface 300mm mainframe interlock PCB |
| 0190-00820 PS-3310i-RDN-C100 | API Controls, servo drive PS-33101-RDN-C100 | |
| 0190-05996 | AMAT | Analog I/O board ASSY |
| 0190-07450 | AMAT | DIDO-0710 board |
| 0190-07451 | AMAT | Analog I/O CPCI card |
| 0190-09378 P1125 | Heater driver |