| Part number | Brand | Description |
|---|---|---|
| 0010-59796 | AMAT | 300mm Heater |
| 0020-01179 | AMAT | MEC81105-209L Overlay Support |
| 0020-03589 | AMAT | Vespal Clamp Ring |
| 0020-34118 | AMAT | Clamp Ring |
| 0020-35625 | AMAT | SHIELD, DOME NECK |
| 0020-35665 | AMAT | Cover Shield Lamp Base |
| 0020-35682 | AMAT | REFLECTOR 2X4 FRONTSIDE 17 DEG |
| 0020-37214 | AMAT | COVER SHIELD,LAMP BASE,LOWER |
| 0020-37215 | AMAT | CONE LH,LOWER LAMP MODULE |
| 0020-37216 | AMAT | CONE,RH,LOWER LAMP MODULE |
| 0020-37228 | AMAT | Reflect LH |
| 0020-37229 | AMAT | Reflect RH |
| 0040-35137 | AMAT | ELDMENT HEAT SHIELD |
| 04-707980-01 | Magnet Assembly | |
| 04-707985-03 | Magnet assembly | |
| 04-707985-05 | Magnet Assembly | |
| 04-709847-01 | Quantum Bearing Seal Assy | |
| 04-716498-01 | Magnet Assembly | |
| 0992-70275 | AMAT | Fine Grid |
| 12020-509 | SEMITOOL | Semitool Stage Teflon |
| 150PC | MAGNETRON | 080921 Fusion 150PC Magnetron |
| 1D10-101475-11 | PLATE. BAFFLE | |
| 270-S | SEMITOOL | SEMITOOL DUAL STACK SRD |
| 3880-01182 | AMAT | Washer |
| 4520XL | LAM | LAM RESERCH METAL ETCH 4520 XLEN |
| 713-000032-002 | LAM | Bushing, Ultem |
| 713-004108-001 | LAM | Teflon Plug |
| 713-009161-001 | LAM | 4pin Lifter |
| 713-010426-369 | LAM | Insert Vespel Ring 6" |
| 713-011205-001 | LAM | Window Rev G |
| 713-011545-003 | LAM | Spring Guide |
| 713-011545-004 | LAM | Lam 4520/9600 |
| 713-011548-001 | LAM | Guide Plunger |
| 713-011558-001 | LAM | Ring |
| 715-011531-015 | LAM | Electrode aluminum |
| 715-042721-885 | LAM | Chamber Liner PTK3 |