Search Parts

Part number	Brand	Description	Equipment	Process	Vendors
490/590, 810-007930-001	LAM	Lam Research AutoEtch Combination PCB	AutoEtch	Etch	–
12/24, 676-000504-003	LAM	Lam Research / VDC MOTOR FOR AUTOETCH GAP DRIVE SYSTEM	AutoEtch	Etch	–
233-2082-59	LAM	Lam Research AutoEtch Auto Etch 490 590 Assembly Lifter Entrance	AutoEtch	Etch	–
4-pin, 715-009161-001	LAM	4-pin wafer lifter .031 for LAM Research AutoEtch.	AutoEtch	Etch	–
4-PIN, 853-009520-001	LAM	Lam Research / AutoEtch 4-PIN Lifter Assy	AutoEtch	Etch	–
490/590	LAM	Lam Research AutoEtch Assembly Misc Parts Assemblies.All For One Price	AutoEtch	Etch	–
490/590	LAM	Lam Research AUTOETCH, HINE DESIGN WAFER INDEXER	AutoEtch	Etch	–
490/590, 716-006446-001	ADVANCED ENERGY	LAM / Advanced Energy 5 quot Diffuser, for LAM AutoEtch	AutoEtch	Etch	–
490/590, 810-00668-001	LAM	Lam Research AUTOETCH, PCB	AutoEtch	Etch	–
490/590, 810-7930-1	LAM	Lam Research AUTOETCH COMBINATION PCB, REV. F	AutoEtch	Etch	–
490/590, 853-001198-001	LAM	Lam Research AUTOETCH PLASMA ETCHER DOOR ASSEMBLY.	AutoEtch	Etch	–
490/590, 853-007210-001	LAM	Lam Research AUTOETCH RECIPE / SERVICE MODULE	AutoEtch	Etch	–
490/590, 853-007210-001	LAM	Lam Research AutoEtch Key Switch Assembly	AutoEtch	Etch	–
490/590, 853-008389-002, 853-090535-001	LAM	Lam Research AUTOETCH	AutoEtch	Etch	–
490/590, 853-090221-001	LAM	Lam Research / Assembly AutoEtch Gap Adjust Sprocket	AutoEtch	Etch	–
490/590, 853-092354-001	LAM	Lam Research AUTOETCH STEPPER MOTOR ARM DRIVE MODULE	AutoEtch	Etch	–
490/590, 853-4106-1	LAM	Lam Research AUTOETCH ENTRANCE LIFTER ASSY	AutoEtch	Etch	–
490/590/790, 409-240010-003	LAM	Lam Research AutoEtch Controller Manual	AutoEtch	Etch	–
590B, 853-002030-001	LAM	LAM AutoEtch 590 Plasma Etcher, ASM RF Match 490, 450783	AutoEtch	Etch	–
713-000038-001	LAM	pair of Lexan covers for autoetch loadlock	AutoEtch	Etch	–
715-000003-001	LAM	Lam Research AutoEtch Auto Etch 490 590 Load Lock Gate	AutoEtch	Etch	–
715-006719-001	LAM	LAM RESEARCH autoetch Seal Plate	AutoEtch	Etch	–
715-007121-001	LAM	Lam Research 5 Inch ENT Wafer Holder Lot of 2 490 AutoEtch	AutoEtch	Etch	–
715-007121-002	LAM	Lam Research 5 Inch EXIT Wafer Holder Lot of 5 490 AutoEtch	AutoEtch	Etch	–
715-007469-001	LAM	LAM RESEARCH autoetch ELECTRODE LOWER	AutoEtch	Etch	–
715-007469-002	LAM	LAM RESEARCH autoetch ELECTRODE LOWER anode	AutoEtch	Etch	–
715-009345-001	LAM	LAM RESEARCH autoetch Lower Seal Plate	AutoEtch	Etch	–
715-8763-001	LAM	LAM RESEARCH AUTOETCH BAFFLE UPPER	AutoEtch	Etch	–
716-006446-001	ADVANCED ENERGY	LAM / Advanced Energy 5" Diffuser, Part Number LAM, for LAM 490/590 AutoEtch	AutoEtch	Etch	1
726-001513-001	LAM	Lam Research Autoetch Latch	AutoEtch	Etch	–
810-004115-002	LAM	Lam Research AUTOETCH 490 / 590 ETCHER MEMORY CARD. REV E	AutoEtch	Etch	–
810-008566-001	LAM	Lam Research OnTrak PCB MOTOR DRIVER - LAM AUTOETCH	AutoEtch	Etch	–
810-8566-1, 810-008566-001	LAM	PCB Motor Driver, Lam Autoetch	AutoEtch	Etch	–
810-8566-1, 810-008566-001	LAM	Lam Research PCB Motor Driver, Lam Autoetch	AutoEtch	Etch	–
810-9781-001, 853-009300-001	LAM	Lam Research AUTOETCH Gap Drive Controller	AutoEtch	Etch	–
853-000358-001	LAM	LAM Research Corp. AutoEtch Monitor Assembly	AutoEtch	Etch	–

Parts

Browse part numbers for semiconductor equipment on Part Number eXchange, by brand, equipment and process, with the vendors that carry them.