| Part number | Brand | Description |
|---|---|---|
| 3M87-025700-11 | TEL | LIFTER ASSY, PK566-NACM |
| AS102S-B3, 2115-000096-11 | TEL | TEL Tokyo Electron Gas Source Assembly Kit AE Advanced |
| 0.3-110, 2910-400909-11 | TEL | TUBE |
| 00-1757-002-912079 | TEL | TEL GAP UNITY M |
| 0010-10982 | TEL | PROCESS KIT |
| 001007AA-69213 | TEL | PROCESS KIT |
| 001012T-61311 | TEL | PROCESS KIT |
| 001024AA-69213 | TEL | PROCESS KIT |
| 001053T-78612 | TEL | PROCESS KIT |
| 00194S-38711 | TEL | PROCESS KIT |
| 002005T-93812 | TEL | PROCESS KIT |
| 002007W-85712 | TEL | PROCESS KIT |
| 0040-99952 | TEL | PROCESS KIT |
| 00768-157, V75 | TEL | 2 O-RING VITON V75 |
| 0095-00440 | TEL | CHUCK - LX Unity |
| 012-001050-1, 152-0080P, MKS 100996194, 100996194 | TEL | TEL TOKYO ELECTRON DS VALVE, VAC, MKS, 120097 |
| 012-001824-1 | TEL | VALVE, SOL VJ3133T-6LOZ-X44 |
| 012-003576-1 | TEL | Chemicals |
| 012-004123 | TEL | Tokyo Electron TEL Unity II Slit Valve Working |
| 012-004123, U2-855DD | TEL | TEL Tokyo Electron Slit Valve Unity II Used Working |
| 012-004593-1 | TEL | Solenoid Valve |
| 012-006101-1 | TEL | ADH |
| 012-007666-1 | TEL | MANIF, M4SB010-20FL273519 |
| 012-007695-1 | TEL | V,AIR FPR-SDA-21-6.35UGF-A |
| 012-012473-1 | TEL | VALVE,SOL SZ3A60K-5LOZ-C4 |
| 012-013045-1 | TEL | SHAFT,PUNCH HVR5HK-001-001 |
| 014-0005606-1 | TEL | TEMP CONTR PT CVM-5A/CE |
| 014-000732-1 | TEL | POWEr SUPLY HPCPD34NM ABCS7/CE |
| 014-000823-1 | TEL | CONTROLLER,TEMP..DMC10S 4CR0000 |
| 015-019662-1 | TEL | FUSE,THERMAL A5002902 |
| 015-021198-1 | TEL | HEATER,CARTRIDGE A5004710 |
| 015-022567-1 | TEL | PBFC FCSP7002-HT50-4WS1-F |
| 018-002610-1 | TEL | LINEAR GUIDE |
| 018-002689-1 | TEL | LM GUIDE,,HSR12R1ME 97LM AFF |
| 018-DS080612-04/T5 | TEL | PROCESS KIT |
| 020-001068-1 | TEL | M2 PAN HEAD SCREW |