| Part number | Brand | Description |
|---|---|---|
| 31-398-002 | TEGAL | PCB ASSY |
| 33-085-002 | TEGAL | |
| 901e | TEGAL | Tegal 3 6 Etcher |
| 903e | TEGAL | Tegal 3 6 Etcher |
| 903e | TEGAL | Board for |
| 98-391-004 | TEGAL | PCB ASSY |
| 99-173-008 | TEGAL | |
| 99-406-001 | TEGAL | PCB ASSY |
| 99-416-001 | TEGAL | PCB ASSY |
| CD1310-00202 | TEGAL | ENDPOINT MODULE, STRIPP, 99-390-004 |
| CR1008 | TEGAL | Automatch |
| CR1008-00103 | TEGAL | Tegal |
| CR1008-00406RW | TEGAL | Automatch |
| CR1113 | TEGAL | Automatch |
| CR1113-00301 | TEGAL | Automatch |
| CR1113-00801 | TEGAL | Automatch |
| CR1144-00104 | TEGAL | MATCHING NETWORK |
| MS110 | TEGAL | |
| MW-10-23191or Tegal CR1264 | TEGAL | |
| OEM12B-05 FOR TEGAL 981 | TEGAL | |
| T-1000E | TEGAL | RF SIGNAL GENENRATOR SUPPLY |
| Tegal 901 | TEGAL | Tegal 901 Poly-Etch |
| Tegal 901 Poly-Etch 10764 | TEGAL | Tegal 901 Poly-Etch |
| Tegal 915, CR1008-00408 | TEGAL | Tegal |