| Part number | Brand | Description |
|---|---|---|
| CVD PD-4800 | SAMCO | SAMCO CVD PD-4800 |
| PD3800 PECVD | SAMCO | 1 for 4" LED and 1 for 6" Si wafer |
| RIE 10 NR | SAMCO | SAMCO RIE 10 NR RIE, 8 |
| RIE-200C | SAMCO | SAMCO,8 |
| RIE-200IPC | SAMCO | SAMCO, RIE-200IP |
| RIE-212 ICP | SAMCO | LED |
| RIE-230LC | SAMCO | Dry Etcher |
| RIE-331LC | SAMCO | Dry Etcher |
| UV-1 | SAMCO | UV OZONE DRY STRIPPER |
| V-100 | SAMCO |