| Part number | Brand | Description |
|---|---|---|
| A200 | PVA TEPLA | Single-wafer ashers deliver higher throughput and uniformity, while batch tools load multiple wafers on a quartz boat and can reduce cost per wafer. PVA TePla’s GIGAbatch platforms combine batch advantages with modern sources, and the GIGAfab A200 300 series offers automatic single-wafer ashing up to 300 mm. |