| Part number | Brand | Description |
|---|---|---|
| 0021-22714 | INVAX | CONTACT, DC, INVAX |
| 0040-34734 | INVAX | ESC 300MM INVAX MONOPOLAR |
| 02240-012, 0190-19092 | INVAX | Invax Pedestal Bipolar ESC 300mm DPN Plus AMAT |
| 02425-011 | INVAX | |
| CVD 106960, 02000-011, 0040-18219 | INVAX | AMAT Invax LASED 200MM ESC SNWF W/WTM HDP CVD, 106960 |
| CVD 106961, 02000-011, 0040-18219 | INVAX | AMAT Invax LASED 200MM ESC SNWF W/WTM HDP CVD, 106961 |
| CVD 106962, 02000-011, 0040-18219 | INVAX | AMAT Invax LASED 200MM ESC SNWF W/WTM HDP CVD, 106962 |
| CVD 106963, 02000-011, 0040-18219 | INVAX | AMAT Invax LASED 200MM ESC SNWF W/WTM HDP CVD, 106963 |
| CVD 106964, 02000-011, 0040-18219 | INVAX | AMAT Invax LASED 200MM ESC SNWF W/WTM HDP CVD, 106964 |
| CVD 107302, 02000-011, 0040-18219 | INVAX | AMAT Invax LASED 200MM ESC SNWF With WTM HDP CVD, 107302 |
| CVD 107303, 02000-011, 0040-18219 | INVAX | AMAT Invax LASED 200MM ESC SNWF With WTM HDP CVD, 107303 |
| CVD 108568, 02000-011, 0040-18219 | INVAX | AMAT Invax LASED 200MM ESC SNWF With WTM HDP CVD, 108568 |