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GASONICS parts

29 part numbers for GASONICS semiconductor equipment on Part Number eXchange.

Part numberBrandDescription
05-0127GASONICS
05-3606GASONICSPROCESS CHAMBER,WELDMENT, IRIDIA-DL, INNER LENGTH 25CM
06-2725GASONICSSHOWER HEAD, TUBE 1.83 ID, SAPPHIRE,IRID
11018-VHPGASONICSHOME SENSOR, TABLE, VHP GASONICS VHP USE ONLY
12390-02GASONICSGasonics Match
16384-01GASONICS, IPCPCB, PWA INTERLOCK DRIVER, 16383-01
17327-01GASONICSLAMPTRAY, FOR GASONICS AURA 3010 3000
17447-01GASONICSLAMP CONTROLLER A3000
17447-01GASONICSLAMP CONTROL MODULE A3000
2000LLGASONICSGasonics Aura
3750-01052GASONICSPLASMA KIT 7-PARTS PRSP GASONICS
95-2992GASONICSMicrowave
95-3620GASONICS
95-3621GASONICS
ESI e3511GASONICSMatch wafer size and production volume For 200 300 mm high-throughput lines, consider automatic single-wafer tools like TePla’s GIGAfab. For R D or legacy 3 6 in lines, downstream systems like the Gasonics Aura 1000 or ESI e3511 may suffice.
Gasonics L3510 ashersGASONICSGasonics L3510 ashers
IRIDIA 4800GASONICSGASONICS IRIDIA 4800 DL SN.M860220
IRIDIA 4800GASONICSGASONICS IRIDIA 4800 DL SN.M860680
IRIDIA 4800GASONICSGASONICS IRIDIA 4800 DL SN.M860070
IRIDIA 4800 DLGASONICSGASONICS GASONICS IRIDIA 4800 DL SN M860210
IRIDIA 4800 DLGASONICSGASONICS IRIDIA 4800 DL
L3500GASONICSGASONICS ...
L3500GASONICSGASONICS SN.95112
L3510GASONICSGasonics 3 8
L3510GASONICSTrue downstream microwave plasma 24 in from the product compatible with Gasonics chambers 60 350 C range and lamp-assisted processing modern PC controls, Ethernet, and SECS/GEM.
L3510/A3010GASONICSGaSonics
Lam 490GASONICS2000 - Leased a 6,000 sq. ft. building in Lynnwood, WA. Started refurbishment of Lam 490 590, Gasonics A1000, AMAT 8310s 8330s, and AMAT P5000 Systems.
PM 732, 12390-02GASONICSGasonics IPC Match
PX-500GASONICSDownstream afterglow Plasma is generated in a separate chamber reactive radicals flow over the wafer after electrons/ions recombine, avoiding electrical damage. Examples include the Gasonics Aura 1000, March, and March PX-1000.