| Part number | Brand | Description |
|---|---|---|
| 100-150mm | DRYTEK | Liner Ceramic, CHMBR 2, 4, Upper Electrode Drytek |
| 384T, 710-080049-001 | DRYTEK | Drytek / Lam System Interface / ESC |
| 384T, 839-080570-001 | DRYTEK | LAM / Drytek PLASMA ETCHER ESC Electrode 150 MM, NOS |
| 384T/ESC, 710-080049-001 | DRYTEK | Drytek / Lam System Interface |
| 715-250599-001 | DRYTEK | DRYTEK / LAM UPPER ELECTRODE DIFFUSER, NOS |
| 853-250549-001 | DRYTEK | Drytek / Lam High Impedance Bias Buffer Amplifier |
| 853-250549-001 | DRYTEK | Lam Drytek Buffer Amplifier High Impedance Bias Assembly |
| Drytek/Lam150MM, ESC 384T,ASIQ, 839-080570-001 | DRYTEK | ESC 384T,ASIQ, Quad |
| ESC 384T, 716-080600-001 | DRYTEK | Drytek/Lam Focus Ring, 150 MM, ESC, 384T |
| ESC 9500, 384T, 715-249333-001 | DRYTEK | LAM / Drytek PLATE, MID, ESC, 9500, ASIQ, NOS |