| Part number | Brand | Description |
|---|---|---|
| 2206-L | CANON ANELVA | AMMONIA MONITOR PARTS |
| 30578 | CANON ANELVA | O-Ring |
| A12-55957, CDQ2WB140-F8377-60 | CANON ANELVA | Lock Vlv |
| A14-37119 | CANON ANELVA | A2A sequencer |
| A18-31766 | CANON ANELVA | PY464.5 O-Ring |
| B13-20893 | CANON ANELVA | Solenoid valve |
| FC-9801 | CANON ANELVA | PC |
| G360, B2401-4D | CANON ANELVA | Oring JIS |
| H11-05286, PC-COM/Z80G 4020-801 | CANON ANELVA | PC-COM Board |
| H11-07428, REX-F9 | CANON ANELVA | Heater Controller |
| H11-10542, DAUMA 10 | CANON ANELVA | Matching Box |
| H11-15624, MKS M-310 | CANON ANELVA | UPC Controller |
| I-1060-SVII | CANON ANELVA | PVD / Sputter |
| MF61 TS6 | CANON ANELVA | Fuse |
| N20000779, PC-9801-29N | CANON ANELVA | GP-IB Board |
| N50020191, 113B-2B | CANON ANELVA | Multi Vacuum Gauge |
| N61190749 | CANON ANELVA | VALVE AIR OPE |
| PC98note | CANON ANELVA | PC for EPD |
| RC206 | CANON ANELVA | Controller |