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BROOKS parts

1,363 part numbers for BROOKS semiconductor equipment on Part Number eXchange.

Part numberBrandDescription
Robot MAG7 E4BROOKS
Robot MTR5BROOKS, NOVELLUS
Robot MTR5BROOKS, LAM
Robot MTR5BROOKSRobot
Robot MTR5 ArmsetBROOKSRobot
Robot MTR5 ArmsetBROOKS, NOVELLUS
Robot MTR5 ArmsetBROOKS, LAM
ROBOT TT1ENR2-1-TVS-ES-BROOKS8BROOKSBROOKS ROBOT TT1ENR2-1-TVS-ES-BROOKS8
RX60BROOKS, STAUBLIRX60 overhaul and robot teaching made by Staubli
S097Y847AAABROOKSPCB ASSY D-CONNECTOR FOR 5851EM SENSOR ASSY MODEL 5851EMA3EKTHDKC
S54E4605BROOKSBrooks ATR 60 with Mounting Bracket Asyst Protocol
SC81-CEBROOKSROBOT CONTROLLER, P/N 6-0002-1022-SP
SC85-CEBROOKSROBOT CONTROLLER, 100-240VAC, 50/60HZ, 6A
SCCM 170503, BROOKS 5964, 0226-44959BROOKSBROOKS 5964 AMAT MFC MASS FLOW CONTROLLER, N2, 100 SCCM, 170503
SEMI E21.1BROOKSSEMI E21.1
SENTRY 1510BROOKSPRESSURE CONTROL MODULE
SENTRY 1510BROOKSPRESSURE CONTROL MODULE, P/N 12027G02
SENTRY 1510BROOKSPRESSURE CONTROL MODULE, P/N 11911G01
SFD33WA1B2G4, 1350-00045BROOKSBrooks Instruments Pressure Transducer AMAT
SLA7810D1EGG1A2A1BROOKSMFC, DELTA CLASS SMART MASS FLOW
SLA7820D1EGG1A2A1BROOKSMFC, DELTA CLASS SMART MASS FLOW
SLA7840AZ635, 797-227472-003BROOKSBrooks Delta Class Smart Flow Controller
SLA7950S1EGG1B2E1BROOKSMFC DELTA CLASS
SLA7950S1EGG1D2A1, GAS 02, 0190-25632BROOKSAMAT BROOKS MASS FLOW CONTROLLER GAS 02 30000SCCM
SLA7951SZ204, N20, 22-309113-00BROOKSBrooks Gas N20 Flow Rate 25 SLPM Mass Flow Controller
SN59771674BROOKSPRI Reticle Stocker SMIF
SP1BROOKSPhoenix Handler, Robot Handlers Brooks, SP1 Parts
SYSTEM ESC212B-S293, ESC-212B-S293, 0520-00022BROOKSAMAT CONTR FULL SYSTEM ESC212B-S293,BROOKS AUTOM
T1104-11-000-14BROOKSPOLYCOLD COMPACT CHILLER
T1104-11-290-14, 0190-A8780BROOKSPOLYCOLD SYSTEMS PCC COMPRESSOR / BROOKS AUTOMATION
T2U-S1, TECHWARE 2 ULTRABROOKS
T4102-XXBROOKSCRYOGENIC ADSORBER
T5X-S2, S/N 00310, TECHWARE 5 EXPRESSBROOKS
T5X-S2, S/N 00319, TECHWARE 5 EXPRESSBROOKS
T5X-S2, TECHWARE 5 EXPRESSBROOKS
TBMBROOKS