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BROOKS parts

1,363 part numbers for BROOKS semiconductor equipment on Part Number eXchange.

Part numberBrandDescription
001-5500-02BROOKSVACUTRAN 5 VTR5 TRANSFER ROBOT DRIVE, 001-1951-05
001-7124-01BROOKSBROOKS AUTOMATION REV. 1 PCB BOARD
001-7126-01BROOKSBROOKS Automation Rev.A4 Controller Board
001-7325BROOKSBROOKS-PRI AUTOMATION
001-7500-02BROOKSBrooks Automation ROBOT VTR5
001-7600-02BROOKSVACUTRAN 5 MTR5 TRANSFER ROBOT DRIVE, 001-1951-06
001-7600-07BROOKS
001-7600-07, MTR-5, 05-118198-00BROOKSBROOKS MTR-5 ROBOT / BROOKS AUTOMATION
001-7600-07, MTR5 ROBOT, 9905-10327BROOKS, LAM, NOVELLUS
001-7600-10BROOKSMTR5 ROBOT VACUTRAN 5
001-7600-10BROOKSMTR5 ROBOT VACUTRAN 5 W/O SIDE COVER
001-7600-10BROOKS
001-9010-07BROOKSLOAD LOCK ROBOT
001-9010-13BROOKSGENUS 200MM LEFT LOAD LOCK
001-9010-20BROOKSLOAD LOCK ROBOT
001-9010-24, INDEX ROBOT, 9802-10502BROOKS, GENUSINDEX ROBOT
001-9015-01BROOKSBROOKS-PRI AUTOMATION
001-9049-02BROOKSPLATFORM BASE ASSY
001-9060-16, 799-900842-001BROOKSLH VCE6 ARM ASSY, LAM
001-9093-05BROOKSBROOKS-PRI AUTOMATION
001-9200-17BROOKSBrooks Automation Model Vertical Cassette Elevators
001-9323-01BROOKSPCB ROBOT CONTROLLER
0010-4130-03BROOKSBROOKS AUTOMATION
0011847-000BROOKSBrooks Automation ATM407 Robot
002-0011-08BROOKS
002-0016-04, MAG7 ARM SETBROOKS
002-0016-14BROOKS
002-0016-14BROOKSDUAL ARM ASSY FOR MAG7
002-0016-14BROOKSMAG 7 ARMSET - DUAL ARMSET
002-0016-21BROOKSARM ASSY FOR MAG 7 WAFER TRANSFER ROBOT
002-0016-33BROOKS
002-0016-33, MAG7 ARM, 0605-10976BROOKS, WONIK IPS
002-0567-01BROOKSKIT, SMALL WINDOW, TRANS, CHAMBER, UNDERNEATH, 564701, 001-4753-01, 001-5146-01
002-0921-20BROOKSROBOT FOR VCE5 ELEVATOR
002-0921-20, 0005-10372BROOKS
002-0921-20, 002-0861-02, VCE5 VACUUM CASSETTE ELEVATORBROOKS