| Part number | Brand | Description |
|---|---|---|
| 0020-24914 | BOC EDWARDS | BOC EDWARDS COVER RING AMAT |
| 0021-07984 | BOC EDWARDS | BOC Edwards Outer Shield, AMAT |
| 0021-35946 | BOC EDWARDS | 5622 BOC Edwards AMAT Edge Ring, TXZ, 200mm, SNNF |
| 0050-64927 | BOC EDWARDS | FORELINE, EDP TO ROUGH TV, BOC EDWARDS A |
| 0050-64930 | BOC EDWARDS | FORELINE, ISO VALVE TO EDP, BOC EDWARDS |
| 0200-00531 | BOC EDWARDS | BOC Edwards Chamber Insert, AMAT |
| 0200-00554 | BOC EDWARDS | BOC Edwards Ceramic Lid Isolator, AMAT |
| 0200-36399 | BOC EDWARDS | BOC Edwards Ceramic Ring, AMAT |
| 0200-76057 | BOC EDWARDS | BOC Edwards 300mm Cover Ring, AMAT |
| 085-041-140 | BOC EDWARDS | |
| 233-0689-05, 0200-20055 | BOC EDWARDS | AMAT BOC EDWARDS, QUARTZ INSULATOR 8 quot PRE CLEAN |
| 233-2700-92, 0020-29719 | BOC EDWARDS | Boc Edwards, Pedestal, AMAT, Kachina |
| 233-3889-52, 0020-24719 | BOC EDWARDS | Boc Edwards, Cover Ring, AMAT, Kachina |
| 233-3889-53, 0020-24746 | BOC EDWARDS | Boc Edwards, Lower Shield, AMAT, Kachina |
| 233-5520-11, 0020-26588 | BOC EDWARDS | AMAT BOC EDWARDS, SHIELD, PRECLEAN 8 quot |
| 30PCA2045 | BOC EDWARDS | PCB, TURBO PUMP POWER SUPPLY, 03X016 |
| 40CR | BOC EDWARDS | BOC EDWARDS EXIT OIL FILTER CR BASE MODULE 40CR. |
| 50/60Hz | BOC EDWARDS | VACUUM TURBO PUMP, 110V, BOC Edwards N03833947 |
| 94PCA3842 | BOC EDWARDS | PCB, TURBO PUMP POWER SUPPLY, 24Q0Y070D |
| 94PCA3851 | BOC EDWARDS | PCB, TURBO PUMP CONTROLLER, 0BQ0J147C |
| A27160005 | BOC EDWARDS | OIL BOX, PRINTED GASKET, FOR RV SERIES ROTARY VANE PUMPS |
| A27160006 | BOC EDWARDS | PRINTED GASKET CARTRIDGE RV FOR RV3, RV5, RV8 AND RV12 |
| A27160007 | BOC EDWARDS | TOP PLATE GASKET FOR RV3,RV5,RV8,RV12 |
| A40902819 | BOC EDWARDS | IPX GAS MODULE |
| A46233028 | BOC EDWARDS | FITTING PACK MF30 |
| A52844410, 3620-01525 | BOC EDWARDS | Boc Edwards Interface Module Flash High Vacuum AMAT 402108 |
| A52844410, 3620-01525 | BOC EDWARDS | Boc Edwards Interface Module Flash High Vacuum AMAT 402107 |
| A52844410, 3620-01525 | BOC EDWARDS | Boc Edwards Interface Module Flash High Vacuum AMAT 402134 |
| A52844410, 3620-01525 | BOC EDWARDS | Boc Edwards Interface Module Flash High Vacuum AMAT 402130 |
| A52844410, 3620-01525 | BOC EDWARDS | Boc Edwards Interface Module Flash High Vacuum AMAT 402138 |
| A52844410, 3620-01525 | BOC EDWARDS | Boc Edwards Interface Module Flash High Vacuum AMAT 402121 |
| A52844410, 3620-01525 | BOC EDWARDS | Boc Edwards Interface Module Flash High Vacuum AMAT 402122 |
| A52844420 | BOC EDWARDS | |
| A52844454 | BOC EDWARDS | |
| A53269011 | BOC EDWARDS | FLANGE NW50 |
| A55101061 | BOC EDWARDS | VACUUM PRODUCTS 3 WAY VLV CONN A JKT |