| Part number | Brand | Description |
|---|---|---|
| 02-321154C01 | ASM | ASSY-CA-MOTOR DRIVE, EAD Motor |
| 02-321258D01 | ASM | RP Exhaust Flange Cover |
| 02-321345D01 | ASM | ASSY-OPTICAL SWITCH |
| 02-321964B09 | ASM | CENTER EPROM |
| 02-321964B10 | ASM | FRONT EPROM |
| 02-321964B11 | ASM | SIDE EPROM |
| 02-321964B12 | ASM | REAR EPROM |
| 02-323412C01 | ASM | ASSY-WTA Rotation Motor |
| 02-323584D01 - 2nd Source New | ASM | 200mm Center TC |
| 02-323653D01 - 2nd Source New | ASM | 200mm Rear TC |
| 02-323654D01 | ASM | ASSY, THERMOCOUPLE, RP, 200MM, QUARTZ, SIDE |
| 02-323654D01 - 2nd Source New | ASM | 200mm Side TC |
| 02-323882D01 | ASM | ASM Assy REFL S Center Lower. |
| 02-324555D01 | ASM | FLUID FLOW SWITCH, PROTEUS 0160B24F2 |
| 02-326679D01-Exchange | ASM | ASSY-WAFER WAND 150MM-Exchange |
| 02-326679D01-Repair | ASM | ASSY-WAFER WAND-150MM - repair service |
| 02-326680D01-Exchange | ASM | ASSY-WAFER WAND 200MM-Exchange |
| 02-326680D01-Repair | ASM | ASSY-WAFER WAND-200mm - repair service |
| 02-327875D01 - 2nd Source New | ASM | 200mm Bi-junction TC |
| 02-332047C01 | ASM | ASSY CA Tube- Present |
| 02-332830D01 | ASM | ASM TRANSFER ARM 290MM, 4500371593 |
| 02-339046-01 | ASM | ASSY-INJ CARTRIDGE UNIVERSAL New Type |
| 02-339046-01-Refurb | ASM | ASSY-INJ CARTRIDGE UNIVERSAL New Type - Refurbishment |
| 02-37859E01 | ASM | Wafer rot motor |
| 02-60764/B | ASM | PCB ASSY, 64-21609C |
| 03-006314D02 | ASM | PCB, SERVO INTERCONNECT BOARD |
| 03-006314D02 | ASM | PCB, SERVO INTERCONNECT BOARD, 16-006343D01 |
| 03-20391 | ASM | PCB ASSY, 64-20391 |
| 03-20601 | ASM | PCB ASSY, 03-20610, 64-20601 |
| 03-20606-01 | ASM | PCB ASSY, 64-20606 |
| 03-20676 | ASM | PCB ASSY, 64-20676 |
| 03-20700-11 | ASM | PCB ASSY, 64-20700 |
| 03-20707-01 | ASM | PCB ASSY, 64-20707B |
| 03-20712 | ASM | PCB ASSY, 64-20712B |
| 03-20764 | ASM | PCB ASSY, 64-20764B |
| 03-20766 | ASM | PCB ASSY, 64-20766 |