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Part number	Brand	Description	Equipment	Process	Vendors
4022.454.51643	ASML	Bending Point Mirror 110mm coated	PAS 5500	ASML	1
4022.454.54832	ASML	BMU Incoupling Mirror	PAS 5500/700	ASML	1
4022.454.59231	ASML	BSU Beam Steering Fixed Mirror DUV	PAS 5500/700	ASML	1
4022.454.73871	ASML	Gradient Filter Assy / 2x0 Special	PAS 5500/200	ASML	1
4022.455.8210.1 / 637.93101	ASML	Variable Attenuator 248nm KrF cid 9	PAS 5500/700	ASML	1
4022.456.0049.1	ADE, ASML	ADE Retarder Assembly	PAS 5500/1100	ASML	1
4022.456.30171	ASML	Digital Gradient Filter Assy /400	PAS 5500/400	ASML	1
454.48111	ASML	Lens Plano Convex F500 Pos C	PAS 5500/750 ELS-6600/G21K4 Laser +AT:750	ASML	1
456.12101	ASML	BXP Lens A PAS AT / 8xx	PAS 5500/800 ELS-76XX/G41K4/A700GK Laser +XT:760, XT:8X0	ASML	1
456.12112	ASML	BXP Lens B PAS AT / 8XX	PAS 5500/800 ELS-76XX/G41K4/A700GK Laser +XT:760, XT:8X0	ASML	1
456.12122	ASML	BXP Lens C PAS AT / 8XX	PAS 5500/800 ELS-76XX/G41K4/A700GK Laser +XT:760, XT:8X0	ASML	1
631.31312	ASML	BXP Lens A 8x0 Long Life	PAS 5500/800 ELS-7610K/G41K4-1H Laser	ASML	1
631.31321	ASML	BXP Lens B 8x0 Long Life	PAS 5500/800 ELS-7610K/G41K4-1H Laser +XT:1000	ASML	1
SERV.454.99322/502.27639	ASML	Beam Steering Mirror 193nm	PAS 5500	ASML	1

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