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Parts

Browse part numbers for semiconductor equipment on Part Number eXchange, by brand, equipment and process, with the vendors that carry them.

Part numberBrandDescription
SEZSP223-RefurbLAMSEZ SP223 Repair
SG4-2C-6F, VALVE 1/4, LAM 1001117724ENTEGRISAMAT ENTEGRIS VALVE 1/4 FLARE FOR MESA CMP LAM 1001117724
SGDA-01ASSPEEDFAMAC Servo Pack
SGDA-02ASSPEEDFAMAC Servo Pack
SGDB-44ADG, 0870-01023YASKAWAAMAT MIRRA PLATEN DRIVER 200MM YASKAWA SGDB-44ADG, USED
SGDB-44ADGY451, 0190-06296YASKAWAAMAT DRIVER SERVOMOTOR MIRRA CMP YASKAWA, USED
SGDH-75AE, 0190-08040YASKAWAAMAT PLATEN DRIVER, 300MM REFLEXION/YASKAWA SERVOPACK 200V SGDH-75AE
SGDH-75AE, Y906, 0190-08040YASKAWAYaskawa SGDH-75AE Rotation Motor Driver AMAT Reflexion works
SGM-01AWG26SPEEDFAMAC Servo Motor Robot X
SGM-01U3B4CL, 1080-01243YASKAWAAC SERVO MTR, 100W, 3000R/MIN, 200V, AMAT
SGM-01U3B4L, 0020-79236, 0020-79238YASKAWAAMAT MIRRA Pad Conditioner Assy Yaskawa
SGM-01U3B4L, 0190-77016VEXTAAMAT MIRRA PAD CONDITIONER MOTOR SWEEP Vexta
SGM-02AWFM21SPEEDFAMAC Servo Motor Unload Casette
SGMS-50A6ABAMATYaskawa Servo Motor for Applied Materials Mirra CMP
SGMS-50A6AB, SH10VA-S50A6, 0240-77490YASKAWAAMAT MIRRA Assy Yaskawa Servo Motor 2
SGMS-50A6AB, SH10VA-S50A6, 0240-77490YASKAWAAMAT MIRRA Assy Yaskawa Servo Motor
SGMS-50A6AB, SH10VA/P04U3, 0240-77490YASKAWAAMAT MIRRA Assy Yaskawa Servo Motor 3
SHP01, 0020-78718AMATMIRRA AMAT P2 SHP01 IT Manifold Assemgly Upper Pneumatics Titan
SHP01, IT1011-N31-X4, 0020-78718AMATMIRRA AMAT P1 SHP01 Manifold Assemgly Pneumatics Titan
SMC-2000-8DMAMAT, SMC
SN 5952, 0010-03697AMATAMAT SWEEP HEAD ASSEMBLY MIRRA 200MM CMP SN 5952
Sns13, 19-147540-12NOVELLUSNovellus / Keyence Mod, Cmp, Fiber Optic Sns13 Appears Unused
SP223CROWNRework Crown Gear UpGrade Kit DV
SP304-SP323LAM300mm Chuck
SP323LAM
SP323LAMSingle Wafer Processing
SP323 UpgradeLAMSP323 Upgrade
SP323-01071LAMInactive
SP323-01071 InactiveLAMSEZ SP323
SPARE 0 CMP, CMP 401318, 3330-01083AMATAMAT INTL SHAFT ROLLER ROTATION INTEGRA SPARE 0 CMP 401318
SPARE 0 CMP, CMP 401319, 3330-01083AMATAMAT INTL SHAFT ROLLER ROTATION INTEGRA SPARE 0 CMP 401319
ST10SB-S50A6, 1080-01170AMATAMAT MIRRA PLATEN MOTOR ASSY W, USED
STPR 5PHASE, CMP UDK5128NA, 0870-01013AMATAMAT DRVR STPR 5PHASE MIRRA 200MM CMP UDK5128NA, USED
SUP1, 0150-12018AMATAMAT Cable Assembly, ECMP Power SUP1 CMP LK, Harness, 414172
SUP1, 0150-12018AMATAMAT, Harness, Cable, Assembly, ECMP, Power SUP1 CMP LK. 414480
SWEEP SGM-01U3B4L, 0190-77016AMATAMAT MIRRA PAD CONDITIONER MOTOR SWEEP SGM-01U3B4L