| Part number | Brand | Description |
|---|---|---|
| 0010-15563/0190-35974 | Temp Probe Sapphire Pin RTP XE | |
| 0010-19534 | AMAT | Refurbishment of Ball Bearing RTP Upper Lower Race |
| 0020-39360 | AMAT | Refurbishment of Ball Bearing RTP Upper Race |
| 0020-39361 | AMAT | Refurbishment of Ball Bearing RTP lower Race |
| 0021-03721 | AMAT | Refurbishment Plate, Reflector, 200mm XE, Corrosion RE |
| 0021-35008 | AMAT | Reflector Plate 200mm Refurbishment |
| 0021-35055 | AMAT | Hülse Lamphead 16.8mm gold-plated |
| 0021-39570 | AMAT | Reflector Plate 200mm BPSG XE |