| Part number | Brand | Description |
|---|---|---|
| 839-019090-620 | LAM | |
| 839-019090-632 | LAM | |
| 3156110-016 | LAM | |
| 3156113-014 | LAM | |
| 660-032596-213 | LAM | TCP RF GEN |
| 660-078399-108 | LAM | UPGRADE BIAS GEN |
| 660-078399-205 | LAM | GEN PRMT,13.56MHZ,3KW PULSE |
| 660-078399-208 | LAM | UPGRADE TCP GEN |
| 660-088884-002 | LAM | GEN RF PRMNT 13.56MHZ 1.5KW PULSING |
| 660-243028-017 | LAM | TCP MATCH |
| 660-244566-008 | LAM | TCP RFG |
| 660-244566-121 | LAM | BIAS RF |
| 715-067213-002 | LAM | LAM, KIYO E4/E5 LOCKER BONDED VALVE |
| 716-003481-833 | LAM | LAM, TCP WINDOW, CERAMIC LLT CTD BAYONET KIYO EX |
| 718-098591-001 | LAM | Lam Research Epoly/KIYO PL Pendulum Vat |
| 790-067213-003 | LAM | LAM, KIYO E4/E5 LOCKER BONDED VALVE |
| 832-034908-009 | LAM | |
| 832-038915-103 | LAM | FRU ASSY BIAS MATCH |
| 832-038915-203 | LAM | BIAS MATCH |
| 839-019090-223 | LAM | |
| 839-019090-225 | LAM | |
| 839-019090-226 | LAM | |
| 839-019090-324 | LAM | |
| 839-019090-324 br 839-019090-328, 839-019090-324, 839-019090-328 | LAM | br |
| 839-019090-328 | LAM | |
| 839-019090-374 | LAM | |
| 839-019090-608 | LAM | |
| 839-019090-611 | LAM | |
| 839-019090-620 | LAM | LAM, 620 ESC, TUNABLE HB-DFB KIYO FX |
| ESC 12" | LAM | KIYO ESC 12" |
| KIYO E5 | LAM | LAM KIYO E5, FLEX EX P/C |
| LAM 2300 | LAM | LAM 2300 KIYO POLY |
| LAM 2300 | LAM | LAM 2300 KIYO / Flex / Flex EX / Excelan / Kiyo45 / KiyoEX / EX / FX |
| P100S | LAM | 1488 PLUS LAM KIYO |
| P100S | LAM | LAM KIYO 1488plus LAM KMCX |
| P100S | LAM | LAM KMCX LAM KFX LAM EXEL LAM XLAN LAM KIYO LAM P120S KFXCVT |